Production of argon metastable atoms in high pressure (20-300 Torr) microwave discharges

Publisher: Edp Sciences

E-ISSN: 0035-1687|23|10|1749-1754

ISSN: 0035-1687

Source: Revue de Physique Appliquée (Paris), Vol.23, Iss.10, 1988-10, pp. : 1749-1754

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