Formules analytiques pour le calcul du profil d'ions implantés

Publisher: Edp Sciences

E-ISSN: 0035-1687|23|5|925-932

ISSN: 0035-1687

Source: Revue de Physique Appliquée (Paris), Vol.23, Iss.5, 1988-05, pp. : 925-932

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