Soft X-ray reflectometry applied to the evaluation of surface roughness variation during the deposition of thin films

E-ISSN： 0035-1687|23|10|1645-1652

ISSN： 0035-1687

Source： Revue de Physique Appliquée (Paris), Vol.23, Iss.10, 1988-10, pp. : 1645-1652

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