Nanolithography by high energy electron beam

Publisher： Edp Sciences

E-ISSN： 0035-1687|23|7|1317-1323

ISSN： 0035-1687

Source： Revue de Physique Appliquée (Paris), Vol.23, Iss.7, 1988-07, pp. : 1317-1323

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Related content

Nonuniform distribution of absorbed energy in high-resistance materials excited by an electron beam

By Shtan’ko V.   Glybin V.   Tolmachev V.  

Technical Physics, Vol. 43, Iss. 4, 1998-04 ,pp. : 396-401

MAIK Nauka/Interperiodica

Access to resources Recommend Favorite

Determination of the profile of energy release from a high-power electron beam in an aerogel

By Demidov B.   Ivkin M.   Ivonin I.   Petrov V.   Efremov V.   Fortov V.   Keeler N.  

Technical Physics, Vol. 42, Iss. 11, 1997-11 ,pp. : 1264-1269

MAIK Nauka/Interperiodica

Access to resources Recommend Favorite

Dispersion dilution of the beam emittance in linear high-energy electron accelerators

By Tsakanov V.  

Technical Physics, Vol. 45, Iss. 7, 2000-07 ,pp. : 887-895

MAIK Nauka/Interperiodica

Access to resources Recommend Favorite

High energy electron-beam irradiation effects in Si-SiOx structures

By  

Journal of Physics: Conference Series , Vol. 682, Iss. 1, 2016-02 ,pp. : 95-102

IOP Publishing

Access to resources Recommend Favorite

ELECTRON BEAM ENERGY BRANCHING IN OXYGEN

By  

Le Journal de Physique Colloques, Vol. 40, Iss. C7, 1979-07 ,pp. : C7-777-C7-778

Edp Sciences

Access to resources Recommend Favorite