THICKNESS DETERMINATION OF Al FILMS ON Si BY A MONTE CARLO CODE INCLUDING A SECONDARY FLUORESCENCE CORRECTION

Publisher: Edp Sciences

E-ISSN: 0449-1947|45|C2|C2-29-C2-32

ISSN: 0449-1947

Source: Le Journal de Physique Colloques, Vol.45, Iss.C2, 1984-02, pp. : C2-29-C2-32

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