PREPARATION AND PROPERTIES OF ION BEAM DEPOSITED a-SiHx

Publisher: Edp Sciences

E-ISSN: 0449-1947|42|C4|C4-627-C4-630

ISSN: 0449-1947

Source: Le Journal de Physique Colloques, Vol.42, Iss.C4, 1981-10, pp. : C4-627-C4-630

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