METASTABLE DECAY AND COLLISIONS OF SPUTTERED METAL AND SILICON CLUSTER IONS

Publisher： Edp Sciences

E-ISSN： 0449-1947|50|C2|C2-133-C2-139

ISSN： 0449-1947

Source： Le Journal de Physique Colloques, Vol.50, Iss.C2, 1989-02, pp. : C2-133-C2-139

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