Optimizing the subwavelength grating of L-band annular groove phase masks for high coronagraphic performance

Author： Vargas Catalán E.   Huby E.   Forsberg P.   Jolivet A.   Baudoz P.   Carlomagno B.   Delacroix C.   Habraken S.   Mawet D.   Surdej J.   Absil O.   Karlsson M.  

Publisher： Edp Sciences

E-ISSN： 1432-0746|595|issue|A127-A127

ISSN： 0004-6361

Source： Astronomy & Astrophysics, Vol.595, Iss.issue, 2016-11, pp. : A127-A127

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Abstract

Context. The annular groove phase mask (AGPM) is one possible implementation of the vector vortex coronagraph, where the helical phase ramp is produced by a concentric subwavelength grating. For several years, we have been manufacturing AGPMs by etching gratings into synthetic diamond substrates using inductively coupled plasma etching.

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