Spectroscopic measurements of phase-resolved electron energy distributionfunctions in RF-excited discharges

Publisher: Edp Sciences

E-ISSN: 1286-4854|66|2|232-238

ISSN: 0295-5075

Source: EPL (EUROPHYSICS LETTERS), Vol.66, Iss.2, 2004-04, pp. : 232-238

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