Spectroscopic measurements of phase-resolved electron energy distributionfunctions in RF-excited discharges
Publisher: Edp Sciences
E-ISSN: 1286-4854|66|2|232-238
ISSN: 0295-5075
Source: EPL (EUROPHYSICS LETTERS), Vol.66, Iss.2, 2004-04, pp. : 232-238
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