Temperature effects on the mechanical reliability of MEMS structures: experimental study on creep and thermal fatigue

Author: De Pasquale G.  

Publisher: Edp Sciences

E-ISSN: 2100-014x|6|issue|06001-06001

ISSN: 2100-014x

Source: EPJ Web of Conference, Vol.6, Iss.issue, 2010-06, pp. : 06001-06001

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