Heterodyne polarimetry technology for inspection of critical dimensions

Publisher： Edp Sciences

E-ISSN： 2100-014x|5|issue|02006-02006

ISSN： 2100-014x

Source： EPJ Web of Conference, Vol.5, Iss.issue, 2010-06, pp. : 02006-02006

Access to resources Favorite

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

Critical dimension of biperiodic gratings determined by spectral ellipsometry and Mueller matrix polarimetry

By Foldyna M.   De Martino A.   Garcia-Caurel E.   Ossikovski R.   Licitra C.   Bertin F.   Postava K.   Drevillon B.  

EPJ Applied Physics (The), Vol. 42, Iss. 3, 2008-06 ,pp. : 351-359

Edp Sciences

Access to resources Recommend Favorite

Critical Dimensions for counting Lattice Points in Euclidean Annuli

By Parnovski L.   Sidorova N.  

Mathematical Modelling of Natural Phenomena , Vol. 5, Iss. 4, 2010-05 ,pp. : 293-316

Edp Sciences

Access to resources Recommend Favorite

Development of a Successful Un-Tethered Wastewater Force Main Acoustical Inspection Technology

By Wagner Travis B.  

Proceedings of the Water Environment Federation, Vol. 2010, Iss. 6, 2010-01 ,pp. : 501-505

Water Environment Federation

Access to resources Recommend Favorite

Literature Review of Research on the Technology of Wire Rope Nondestructive Inspection in China and Abroad

By  

MATEC Web of conference, Vol. 22, Iss. issue, 2015-07 ,pp. : 03025-03025

Edp Sciences

Access to resources Recommend Favorite

A Critical Review of Stabilization/Solidification Technology

By Conner Jesse R.   Hoeffner Steve L.  

Critical Reviews in Environmental Science and Technology, Vol. 28, Iss. 4, 1998-10 ,pp. : 397-462

Taylor & Francis Ltd

Access to resources Recommend Favorite