Characterization of ion track morphology formed by swift heavy ion irradiation in silicon oxynitride films

Publisher: Edp Sciences

E-ISSN: 2100-014x|91|issue|00008-00008

ISSN: 2100-014x

Source: EPJ Web of Conference, Vol.91, Iss.issue, 2015-04, pp. : 00008-00008

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Abstract