3D electrostatic actuator fabricated by non-ablative femtosecond laser exposure and chemical etching

Author: Yang Tao  

Publisher: Edp Sciences

E-ISSN: 2261-236x|32|issue|02003-02003

ISSN: 2261-236x

Source: MATEC Web of conference, Vol.32, Iss.issue, 2015-12, pp. : 02003-02003

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Abstract