Plasma-Enhanced Atomic Layer Deposition (PEALD) of TiN using the Organic Precursor Tetrakis(ethylmethylamido)Titanium (TEMAT)

Publisher： Edp Sciences

E-ISSN： 2261-236x|39|issue|01010-01010

ISSN： 2261-236x

Source： MATEC Web of conference, Vol.39, Iss.issue, 2016-01, pp. : 01010-01010

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