2D MEMS electrostatic cantilever waveguide scanner for potential image display application

Author： Gu Kebin  

Publisher： Edp Sciences

E-ISSN： 2261-236x|32|issue|01002-01002

ISSN： 2261-236x

Source： MATEC Web of conference, Vol.32, Iss.issue, 2015-12, pp. : 01002-01002

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