“Microstructured Nanostructures” – Nanostructuring by Means of Conventional Photolithography and Layer-expansion Technique

Author: Platen Johannes   Poghossian Arshak   Schöning Michael J.  

Publisher: MDPI

E-ISSN: 1424-8220|6|4|361-369

ISSN: 1424-8220

Source: Sensors, Vol.6, Iss.4, 2006-04, pp. : 361-369

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Abstract