A Microsystem Based on Porous Silicon-Glass Anodic Bonding for Gas and Liquid Optical Sensing

Author： De Stefano Luca   Malecki Krzysztof   Della Corte Francesco G.   Moretti Luigi   Rea Ilaria   Rotiroti Lucia   Rendina Ivo  

Publisher： MDPI

E-ISSN： 1424-8220|6|6|680-687

ISSN： 1424-8220

Source： Sensors, Vol.6, Iss.6, 2006-06, pp. : 680-687

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