SU-8 Cantilevers for Bio/chemical Sensing; Fabrication, Characterisation and Development of Novel Read-out Methods

Author： Nordström Maria Keller Stephan Lillemose Michael Johansson Alicia Dohn Søren Haefliger Daniel Blagoi Gabriela Havsteen-Jakobsen Mogens Boisen Anja

Publisher： MDPI

E-ISSN： 1424-8220|8|3|1595-1612

ISSN： 1424-8220

Source： Sensors, Vol.8, Iss.3, 2008-03, pp. : 1595-1612

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