A MEMS-based Air Flow Sensor with a Free-standing Micro-cantilever Structure

Author： Wang Yu-Hsiang   Lee Chia-Yen   Chiang Che-Ming  

Publisher： MDPI

E-ISSN： 1424-8220|7|10|2389-2401

ISSN： 1424-8220

Source： Sensors, Vol.7, Iss.10, 2007-10, pp. : 2389-2401

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