A MEMS-based Benzene Gas Sensor with a Self-heating WO3 Sensing Layer

Author： Ke Ming-Tsun   Lee Mu-Tsun   Lee Chia-Yen   Fu Lung-Ming  

Publisher： MDPI

E-ISSN： 1424-8220|9|4|2895-2906

ISSN： 1424-8220

Source： Sensors, Vol.9, Iss.4, 2009-04, pp. : 2895-2906

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