Micromachines – An Open Access Journal on Microelectromechanical Systems (MEMS)

Author： Elwenspoek Miko  

Publisher： MDPI

E-ISSN： 2072-666x|1|2|34-35

ISSN： 2072-666x

Source： Micromachines, Vol.1, Iss.2, 2010-06, pp. : 34-35

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