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Author: Abelmann Leon Tas Niels Berenschot Erwin Elwenspoek Miko
Publisher: MDPI
E-ISSN: 2072-666x|1|1|1-18
ISSN: 2072-666x
Source: Micromachines, Vol.1, Iss.1, 2010-01, pp. : 1-18
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
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