Surface Roughening of Polystyrene and Poly(methyl methacrylate) in Ar/O2 Plasma Etching

Author: Ting Yuk-Hong   Liu Chi-Chun   Park Sang-Min   Jiang Hongquan   Nealey Paul F.   Wendt Amy E.  

Publisher: MDPI

E-ISSN: 2073-4360|2|4|649-663

ISSN: 2073-4360

Source: Polymers, Vol.2, Iss.4, 2010-12, pp. : 649-663

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