Level Set Approach to Anisotropic Wet Etching of Silicon

Author： Radjenović Branislav   Radmilović-Radjenović Marija   Mitrić Miodrag  

Publisher： MDPI

E-ISSN： 1424-8220|10|5|4950-4967

ISSN： 1424-8220

Source： Sensors, Vol.10, Iss.5, 2010-05, pp. : 4950-4967

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