Towards a Casimir Force Measurement between Micromachined Parallel Plate Structures

Author： Nawazuddin Mubassira B. Syed Lammerink Theo S. J. Berenschot Erwin de Boer Meint Ma Ke-Chun Elwenspoek Miko C. Wiegerink Remco J.

Publisher： MDPI

E-ISSN： 2078-1547|3|2|261-277

ISSN： 2078-1547

Source： Challenges, Vol.3, Iss.2, 2012-11, pp. : 261-277

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