Mechanical Vibrations of Thermally Actuated Silicon Membranes

Author： Puchades Ivan   Koz Mustafa   Fuller Lynn  

Publisher： MDPI

E-ISSN： 2072-666x|3|2|255-269

ISSN： 2072-666x

Source： Micromachines, Vol.3, Iss.2, 2012-03, pp. : 255-269

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