Direct Wafer Bonding and Its Application to Waveguide Optical Isolators

Author: Mizumoto Tetsuya   Shoji Yuya   Takei Ryohei  

Publisher: MDPI

E-ISSN: 1996-1944|5|5|985-1004

ISSN: 1996-1944

Source: Materials, Vol.5, Iss.5, 2012-05, pp. : 985-1004

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Abstract