A Hybrid Thermopneumatic and Electrostatic Microvalve with Integrated Position Sensing

Author: Potkay Joseph A.   Wise Kensall D.  

Publisher: MDPI

E-ISSN: 2072-666x|3|2|379-395

ISSN: 2072-666x

Source: Micromachines, Vol.3, Iss.2, 2012-04, pp. : 379-395

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