Comparisons between Membrane, Bridge and Cantilever Miniaturized Resistive Vacuum Gauges

Author： Punchihewa Kasun Gardiye   Zaker Evan   Kuljic Rade   Banerjee Koushik   Dankovic Tatjana   Feinerman Alan   Busta Heinz  

Publisher： MDPI

E-ISSN： 1424-8220|12|7|8770-8781

ISSN： 1424-8220

Source： Sensors, Vol.12, Iss.7, 2012-06, pp. : 8770-8781

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