Simultaneous Patterning of Independent Metal/Metal Oxide Multi-Layer Films Using Two-Tone Photo-Acid Generating Compound Systems

Author： Cordonier Christopher E. J. Honma Hideo

Publisher： MDPI

E-ISSN： 2079-4991|2|4|312-328

ISSN： 2079-4991

Source： Nanomaterials, Vol.2, Iss.4, 2012-10, pp. : 312-328

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