An Integrated Laser-Induced Piezoelectric/Differential Confocal Surface Acoustic Wave System for Measurement of Thin Film Young's Modulus

Author： Yang Fei Dorantes-Gonzalez Dante J. Chen Kun Lu Zimo Jin Baoyin Li Yanning Chen Zhi Hu Xiaotang

Publisher： MDPI

E-ISSN： 1424-8220|12|9|12208-12219

ISSN： 1424-8220

Source： Sensors, Vol.12, Iss.9, 2012-09, pp. : 12208-12219

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