Ceramic MEMS Designed for Wireless Pressure Monitoring in the Industrial Environment

Author： Pavlin Marko   Belavic Darko   Novak Franc  

Publisher： MDPI

E-ISSN： 1424-8220|12|1|320-333

ISSN： 1424-8220

Source： Sensors, Vol.12, Iss.1, 2011-12, pp. : 320-333

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