Prediction of Gap Asymmetry in Differential Micro Accelerometers

Author： Zhou Wu   Li Baili   Peng Bei   Su Wei   He Xiaoping  

Publisher： MDPI

E-ISSN： 1424-8220|12|6|6857-6868

ISSN： 1424-8220

Source： Sensors, Vol.12, Iss.6, 2012-05, pp. : 6857-6868

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