Physically-Based Reduced Order Modelling of a Uni-Axial Polysilicon MEMS Accelerometer

Author: Ghisi Aldo   Mariani Stefano   Corigliano Alberto   Zerbini Sarah  

Publisher: MDPI

E-ISSN: 1424-8220|12|10|13985-14003

ISSN: 1424-8220

Source: Sensors, Vol.12, Iss.10, 2012-10, pp. : 13985-14003

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Abstract