A Fiber Optic Catalytic Sensor for Neutral Atom Measurements in Oxygen Plasma

Author： Zaplotnik Rok   Vesel Alenka   Mozetic Miran  

Publisher： MDPI

E-ISSN： 1424-8220|12|4|3857-3867

ISSN： 1424-8220

Source： Sensors, Vol.12, Iss.4, 2012-03, pp. : 3857-3867

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