In-Plane Resonant Nano-Electro-Mechanical Sensors: A Comprehensive Study on Design, Fabrication and Characterization Challenges

Author： Hassani Faezeh Arab   Tsuchiya Yoshishige   Mizuta Hiroshi  

Publisher： MDPI

E-ISSN： 1424-8220|13|7|9364-9387

ISSN： 1424-8220

Source： Sensors, Vol.13, Iss.7, 2013-07, pp. : 9364-9387

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