Modeling the Microstructure Curvature of Boron-Doped Silicon in Bulk Micromachined Accelerometer

Author： Zhou Wu   Yu Huijun   Peng Bei   Shen Huaqin   He Xiaoping   Su Wei  

Publisher： MDPI

E-ISSN： 1996-1944|6|1|244-254

ISSN： 1996-1944

Source： Materials, Vol.6, Iss.1, 2013-01, pp. : 244-254

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