Empirical-Statistical Study on the Relationship between Deposition Parameters, Process Variables, Deposition Rate and Mechanical Properties of a-C:H:W Coatings

Author： Hetzner Harald   Schmid Christoph   Tremmel Stephan   Durst Karsten   Wartzack Sandro  

Publisher： MDPI

E-ISSN： 2079-6412|4|4|772-795

ISSN： 2079-6412

Source： Coatings, Vol.4, Iss.4, 2014-12, pp. : 772-795

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