Microfabrication of a Novel Ceramic Pressure Sensor with High Sensitivity Based on Low-Temperature Co-Fired Ceramic (LTCC) Technology

Author： Li Chen   Tan Qiulin   Zhang Wendong   Xue Chenyang   Li Yunzhi   Xiong Jijun  

Publisher： MDPI

E-ISSN： 2072-666x|5|2|396-407

ISSN： 2072-666x

Source： Micromachines, Vol.5, Iss.2, 2014-06, pp. : 396-407

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