Optimized SU-8 Processing for Low-Cost Microstructures Fabrication without Cleanroom Facilities

Author： Pinto Vânia C. Sousa Paulo J. Cardoso Vanessa F. Minas Graça

Publisher： MDPI

E-ISSN： 2072-666x|5|3|738-755

ISSN： 2072-666x

Source： Micromachines, Vol.5, Iss.3, 2014-09, pp. : 738-755

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