SU-8 Electrothermal Actuators: Optimization of Fabrication and Excitation for Long-Term Use

Author： Winterstein Thomas Staab Matthias Nakic Christian Feige Hans-Jürgen Vogel Jürgen Schlaak Helmut F.

Publisher： MDPI

E-ISSN： 2072-666x|5|4|1310-1322

ISSN： 2072-666x

Source： Micromachines, Vol.5, Iss.4, 2014-12, pp. : 1310-1322

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