Effect of Showerhead Configuration on Coherent Raman Spectroscopically Monitored Pulsed Radio Frequency Plasma Enhanced Chemical Vapor Deposited Silicon Nitride Thin Films

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Plasma Chemistry and Plasma Processing, Vol. 24, Iss. 2, 2004-06 ,pp. : 307-323

Springer Publishing Company

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Comparative Study of Furnace and Flash Lamp Annealed Silicon Thin Films Grown by Plasma Enhanced Chemical Vapor Deposition

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Coatings, Vol. 8, Iss. 3, 2018-03 ,pp. : 97-97

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Microstructure and Chemical Bonding in Silicon Carbonitride Films Synthesized by Plasma Enhanced Chemical Vapor Deposition

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Plasma Enhanced Chemical Vapor Deposition of Fluorinated Amorphous Carbon Thin Films from Tetrafluoroethylene and Tetraisocyanatesilane

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Pulsed-Spray Radiofrequency Plasma Enhanced Chemical Vapor Deposition of CuInS₂ Thin Films

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