GaN Micromechanical Resonators with Meshed Metal Bottom Electrode

Author： Ansari Azadeh   Liu Che-Yu   Lin Chien-Chung   Kuo Hao-Chung   Ku Pei-Cheng   Rais-Zadeh Mina  

Publisher： MDPI

E-ISSN： 1996-1944|8|3|1204-1212

ISSN： 1996-1944

Source： Materials, Vol.8, Iss.3, 2015-03, pp. : 1204-1212

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