Block Co-Polymers for Nanolithography: Rapid Microwave Annealing for Pattern Formation on Substrates

Author: Borah Dipu   Rasappa Sozaraj   Senthamaraikannan Ramsankar   Holmes Justin D.   Morris Michael A.  

Publisher: MDPI

E-ISSN: 2073-4360|7|4|592-609

ISSN: 2073-4360

Source: Polymers, Vol.7, Iss.4, 2015-03, pp. : 592-609

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