Flexible Pressure Sensor with Ag Wrinkled Electrodes Based on PDMS Substrate

Author: Cui Jianli   Zhang Binzhen   Duan Junping   Guo Hao   Tang Jun  

Publisher: MDPI

E-ISSN: 1424-8220|16|12|2131-2131

ISSN: 1424-8220

Source: Sensors, Vol.16, Iss.12, 2016-12, pp. : 2131-2131

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Abstract

Flexible pressure sensors are essential components of electronic skins for future attractive applications ranging from human healthcare monitoring to biomedical diagnostics, robotic skins, and prosthetic limbs. Here we report a new kind of flexible pressure sensor. The sensors are capacitive, and composed of two Ag wrinkled electrodes separated by a carbon nanotubes (CNTs)/polydimethylsiloxane (PDMS) composite deformable dielectric layer. Ag wrinkled electrodes were formed by vacuum deposition on top of pre-strained and relaxed PDMS substrates which were treated using an O2 plasma, a surface functionalization process, and a magnetron sputtering process. Ultimately, the developed sensor exhibits a maximum sensitivity of 19.80% kPa−1 to capacitance, great durability over 500 cycles, and rapid mechanical responses (<200 ms). We also demonstrate that our sensor can be used to effectively detect the location and distribution of finger pressure.

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