Oxidation Effect for the Carbon Related Defect Formation in SiC/SiO2 Interface by First Principles Calculation

Publisher: Trans Tech Publications

E-ISSN: 1662-9752|2017|897|131-134

ISSN: 0255-5476

Source: Materials Science Forum, Vol.2017, Iss.897, 2017-06, pp. : 131-134

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Abstract