Self-Calibration of Coupling Error for 3-DOF Displacement Measurement of Planar Working Stage Based on Two Planar Gratings

Publisher： Trans Tech Publications

E-ISSN： 1662-7482|2017|870|135-140

ISSN： 1660-9336

Source： Applied Mechanics and Materials, Vol.2017, Iss.870, 2017-10, pp. : 135-140

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

Self-calibration of a general hexapod manipulator with enhanced precision in 5-DOF motions

By Chiu Y.-J.   Perng M.-H.  

Mechanism and Machine Theory, Vol. 39, Iss. 1, 2004-01 ,pp. : 1-23

Elsevier

Access to resources Recommend Favorite

An improved genetic algorithm for planar and spatial straightness error evaluation

By Wen X.   Song A.  

International Journal of Machine Tools and Manufacture, Vol. 43, Iss. 11, 2003-09 ,pp. : 1157-1162

Elsevier

Access to resources Recommend Favorite

Self-calibration of lateral non-linearities of an interference microscope

By Gao W.   Qiang X.-F.   Kiyono S.  

Measurement, Vol. 34, Iss. 3, 2003-10 ,pp. : 245-253

Elsevier

Access to resources Recommend Favorite

A Simplified Self-Calibration Method for Cylindrical Grating

By  

Applied Mechanics and Materials, Vol. 2017, Iss. 868, 2017-08 ,pp. : 99-104

Trans Tech Publications

Access to resources Recommend Favorite

Research and Design of Laser Displacement Measurement Based on the PSD

By  

Applied Mechanics and Materials, Vol. 2015, Iss. 719, 2015-02 ,pp. : 580-583

Trans Tech Publications

Access to resources Recommend Favorite