Structural Examination of Multilayer CrAlSiN/AlSiN Coatings Deposited by Cathodic Arc

Publisher: Trans Tech Publications

E-ISSN: 1661-9897|2017|48|62-70

ISSN: 1662-5250

Source: Journal of Nano Research, Vol.2017, Iss.48, 2017-08, pp. : 62-70

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Abstract