Improvement of Structural, Morphological and Mechanical Properties of CrN_x Sputtered Thin Films by Vacuum Annealing Process

Publisher： Trans Tech Publications

E-ISSN： 1662-9795|2017|751|113-118

ISSN： 1013-9826

Source： Key Engineering Materials, Vol.2017, Iss.751, 2017-09, pp. : 113-118

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Abstract

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