Computational Prediction of Trimethylgallium Adsorption on Si(100)(2×1) in Atomic Layer Deposition

Publisher： Trans Tech Publications

E-ISSN： 1662-9795|2018|759|43-47

ISSN： 1013-9826

Source： Key Engineering Materials, Vol.2018, Iss.759, 2018-02, pp. : 43-47

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